✦ LIBER ✦
Damage-Free Planarization of 2-Inch 4H-SiC Wafer Using Pt Catalyst Plate and HF Solution
✍ Scribed by Okamoto, T.; Sano, Yasuhisa; Hara, Hideyuki; Arima, Kenta; Yagi, Keita; Murata, Junji; Mimura, Hidekazu; Yamauchi, Kazuto
- Book ID
- 120815352
- Publisher
- Trans Tech Publications, Ltd.
- Year
- 2008
- Tongue
- English
- Weight
- 624 KB
- Volume
- 600-603
- Category
- Article
- ISSN
- 1662-9752
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