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Damage distributions in LiNbO3 crystal induced by MeV F+ tilted implantations

✍ Scribed by Wang Zhong-Lie; Shi Bo-Rong; Wang Ke-Ming; Xu Tian-Bing; Zhu Pei-Ran

Book ID
113285608
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
491 KB
Volume
90
Category
Article
ISSN
0168-583X

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The X-cut, Y-propagation LiNbO 3 crystals were implanted by 2.8 MeV P ΓΎ ions with doses of $1 Γ‚ 10 14 ions/cm 2 at room temperature. Planar optical waveguides were formed by P + implantation at doses of 1 Γ‚ 10 14 , 2 Γ‚ 10 14 , 3 Γ‚ 10 14 and 4 Γ‚ 10 14 ions/cm 2 . Contrary to high-dose ion-implanted w