✦ LIBER ✦
Damage annealing process in implanted poly-silicon studied by nanocalorimetry: Effects of heating rate and beam flux
✍ Scribed by R. Karmouch; J.-F. Mercure; Y. Anahory; F. Schiettekatte
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 124 KB
- Volume
- 241
- Category
- Article
- ISSN
- 0168-583X
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