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Cylindrical diode continous vacuum sputtering equipment for laboratory and high volume production: C H George, Abstract. (Proc 19th Nat Symp Am Vac Soc) J Vac Sci Technol, 10 (1), Jan/Feb 1973, 274


Book ID
103463478
Publisher
Elsevier Science
Year
1973
Tongue
English
Weight
139 KB
Volume
23
Category
Article
ISSN
0042-207X

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