✦ LIBER ✦

Cyclic polymers. Edited by J. A. SEMLYEN. ISBN 0-85334-388-8. London/New York: Elsevier Applied Science Publishers 1986. X, 394 pp, £ 52.00

✍ Scribed by K. Dietrich

Publisher: John Wiley and Sons
Year: 1988
Tongue: English
Weight: 306 KB
Volume: 39
Category: Article
ISSN: 0323-7648
DOI: 10.1002/actp.1988.010390333

No coin nor oath required. For personal study only.

✦ Synopsis

The 3rd mnual meeting of the SPIE dealing with resist materials and processing was held again in Santa Clara/CA in the United States. In 3 lecture sessions and additionally in a poster presentation 44 papers (21 oral communications) wcrc offered. The reports were delivered by representatives of leading laboratories in the USA and Japan.

Yolymcr Chemistry, combined with photo-and radiation chemistrj-are acting as the pacemakers in resist development. Accordingly, new sensitive resist polymers, capable of high resolution efficiency, have been synthesized and evaluated. Worth mentioning are e.g.:

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