CW laser annealing of boron implanted polycrystalline silicon : S. Peterstrom, G. Holmen and G. Alestig. Solid-St. Electron. 28 (4) 339 (1985)

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 127 KB
• Volume: 26
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(86)90663-3