✦ LIBER ✦
CVD tungsten and tungsten silicide for VLSI applications : Suresh Sachdev and Robert Castellano. Semiconductor Int. 306 (May 1985)
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 117 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0026-2714
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