CVD Reactions of TiCl4 with Ammonia: a Quantum Chemical Study
β Scribed by Ting-Ting Huang; Kai Tan; Meng-Hai Lin; Qian-Er Zhang
- Publisher
- John Wiley and Sons
- Year
- 2007
- Tongue
- English
- Weight
- 84 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0256-7660
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