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CVD Reactions of TiCl4 with Ammonia: a Quantum Chemical Study

✍ Scribed by Ting-Ting Huang; Kai Tan; Meng-Hai Lin; Qian-Er Zhang


Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
84 KB
Volume
25
Category
Article
ISSN
0256-7660

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