CVD of Poly(α,α′-dimethyl-p-xylylene) an
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Jay J. Senkevich
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Article
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2011
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John Wiley and Sons
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English
⚖ 164 KB
## Abstract The Achilles heel of the parylene polymers is their oxidative stability at room temperature with UV exposure and at elevated temperature >115 °C in air. This weakness is attributed to the aliphatic carbon‐carbon single bond in the main‐chain backbone. Fluorinating this chemistry helps t