CVD of MgO from a Mg(β-ketoiminate)2: Preparation, Characterization, and Utilization of an Intramolecularly Stabilized, Highly Volatile, Thermally Robust Precursor
✍ Scribed by J. S. Matthews; O. Just; B. Obi-Johnson; W. S. Rees Jr.
- Publisher
- John Wiley and Sons
- Year
- 2000
- Tongue
- English
- Weight
- 382 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0948-1907
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✦ Synopsis
Dibutylmagnesium reacts with 2 equivalents of 5-N-(N,N-dimethylaminopropyl)-2,2,7-trimethyl-3-octanone in THF to afford the homoleptic bis(b-ketoiminate) compound 2. Its molecular structure, determined by the single-crystal X-ray diffraction technique, exhibits a six-coordinate magnesium atom surrounded by four nitrogen and two oxygen atoms in an octahedral environment. Compound 2 crystallizes in the triclinic space group P1, a = 9.3288( 5) , b = 9.8151(5) , c = 10.4592(6) , a = 65.2870( 10), b = 85.524(2), g = 83.568(2), V = 863.97(8) 3 , Z = 1, D c = 1.075 g cm ±3 . Refinement of 2436 independent reflections converged to residual values of R 1 = 3.16 % and R w = 8.05 %. Employment of 2 in CVD experiments carried out on a silicon substrate at a temperature of 450 C under an inert atmosphere of argon resulted in the deposition of magnesium oxide, as determined by X-ray photoelectron spectroscopy (XPS). The films were granular in nature, as indicated by scanning electron microscopy (SEM).