CVD of Metals Using Alcohols and Metal Acetylacetonates, Part II: Role of Solvent and Characterization of Metal Films Made by Pulsed Spray Evaporation CVD

CVD of Metals Using Alcohols and Metal A

CVD of Metals Using Alcohols and Metal Acetylacetonates, Part I: Optimization of Process Parameters and Electrical Characterization of Synthesized Films

✍ P.A. Premkumar; N. Bahlawane; K. Kohse-Höinghaus 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 363 KB

## Abstract A new successful strategy is developed for the production of Ni, Cu, and Co films using commercially available metal acetylacetonates as precursors. Pulsed spray evaporation (PSE) CVD is applied utilizing only alcohols as solvents and reducing agents. The efficiency of the process, with