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CVD of copper using copper(I) and copper(II) β-diketonates

✍ Scribed by Mehul B. Naik; William N. Gill; Robert H. Wentorf; Robert R. Reeves

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 728 KB
Volume: 262
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(95)05840-0

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