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CVD elaboration and in situ characterization of barium silicate thin films

✍ Scribed by Thomas Genevès; Luc Imhoff; Bruno Domenichini; Paul Maurice Peterlé; Sylvie Bourgeois

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
519 KB
Volume
30
Category
Article
ISSN
0955-2219

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✦ Synopsis

This study is concerned with the elaboration of barium silicate thin films by metal organic chemical vapor deposition (MOCVD) and in situ characterization by X-ray photoemission spectroscopy (XPS) with an apparatus connected to the deposition reactor. The difficulty to find an efficient metal organic precursor for barium is described. After characterizations of the selected reactant, Ba(TMHD) 2 tetraglyme, the development of an original specific vapor delivering source which allows reactant sublimation in the CVD reactor was performed. In the most optimized cases, including use of oxygen introduction during the deposition, barium silicate films were obtained. Moreover, non-negligible amounts of carbon and presence of barium oxide on the top of the layers were observed.

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