Cutting of thin carbon films with a CO2-gas laser—I. Theoretical considerations and experiments on flat plates : J. G. Siekman, Microelectron. & Reliab. 8, No. 2, May (1969), p. 87

• Publisher: Elsevier Science
• Year: 1970
• Tongue: English
• Weight: 101 KB
• Volume: 9
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(70)90661-x