✦ LIBER ✦
Cutting of conductors on VLSI chips — A comparison between laser and focused ion beam removal
✍ Scribed by Hiroshi Yamaguchi; Akira Shimase; Satoshi Haraichi; Mitsuo Usami; Takahiko Takahashi
- Book ID
- 113279790
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 685 KB
- Volume
- 37-38
- Category
- Article
- ISSN
- 0168-583X
No coin nor oath required. For personal study only.