✦ LIBER ✦
Current-induced recrystallization of polycrystalline silicon nano thin films deposited at different temperatures and its influences on piezoresistive sensitivity and temperature coefficients
✍ Scribed by Chang-zhi Shi; Xiao-wei Liu; Rong-yan Chuai
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 706 KB
- Volume
- 162
- Category
- Article
- ISSN
- 0924-4247
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