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Cubic Boron Nitride Formation by PECVD in the B-N-Cl-H System: Ionic and Chemical Aspects

✍ Scribed by Schaffnit, C.; Thomas, L.; Rossi, F.


Book ID
127380264
Publisher
Taylor and Francis Group
Year
1998
Tongue
English
Weight
233 KB
Volume
13
Category
Article
ISSN
1042-6914

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