PZT thick films with thicknesses between 5 and 150 m are of great interest for microsystems applications where direct coating onto microelectronic substrates and high electromechanical performance are required. Dense PZT thick films have been obtained by combining a PZT-PMN powder with a low melting
β¦ LIBER β¦
CuAlPd alloys for sensor and actuator applications
β Scribed by Z.C. Lin; W. Yu; R.H. Zee; B.A. Chin
- Book ID
- 117682000
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 946 KB
- Volume
- 8
- Category
- Article
- ISSN
- 0966-9795
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