Crystallographic study of semi‐insulating polycrystalline silicon (SIPOS) doped with oxygen atoms

✍ Scribed by Hamasaki, M.; Adachi, T.; Wakayama, S.; Kikuchi, M.

• Book ID: 111937865
• Publisher: American Institute of Physics
• Year: 1978
• Tongue: English
• Weight: 704 KB
• Volume: 49
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.325356