✦ LIBER ✦
Crystallization kinetics of boron- and germanium-implanted 〈100〉 Si: a balance between doping and strain effects
✍ Scribed by F. Corni; R. Tonini; G. Ottaviani; M. Servidori; F. Priolo
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 306 KB
- Volume
- 222
- Category
- Article
- ISSN
- 0040-6090
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