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Crystallisation of zirconolite from an alkoxide precursor

✍ Scribed by E.R. Vance; C.J. Ball; M.G. Blackford; D.J. Cassidy; K.L. Smith


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
755 KB
Volume
175
Category
Article
ISSN
0022-3115

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Hafnium oxide gate dielectrics grown fro
✍ Martin M Frank; Safak Sayan; Sabine DΓΆrmann; Thomas J Emge; Leszek S Wielunski; πŸ“‚ Article πŸ“… 2004 πŸ› Elsevier Science 🌐 English βš– 107 KB

We present an infrared spectroscopy and X-ray diffraction study of hafnium oxide gate dielectric films deposited from hafnium tetra-tertbutoxide, Hf(OC(CH 3 ) 3 ) 4 . We characterize the crystal phase as a function of thickness and detect the chemical state of impurities in this high-permittivity (h