✦ LIBER ✦
Crystallinity properties of parylene-n affecting its use as an ILD in submicron integrated circuit technology
✍ Scribed by X. Zhang; S. Dabral; C. Chiang; J.F. McDonald; Bin Wang
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 395 KB
- Volume
- 270
- Category
- Article
- ISSN
- 0040-6090
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