Effects of substrate temperature on crys
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Takahiro Yamada; Aki Miyake; Seiichi Kishimoto; Hisao Makino; Naoki Yamamoto; Te
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Article
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2007
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Elsevier Science
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English
โ 261 KB
The effects of substrate temperature, T s , on the crystallinity and the electrical properties of Ga-doped ZnO films (GZO) with a thickness of 200 nm were investigated. GZO films were prepared on glass substrates at various T s in the range from 150 to 400 ยฐC by ion-plating method with DC arc discha