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Crystalline SiNxUltrathin Films Grown on AlGaN/GaN UsingIn SituMetalorganic Chemical Vapor Deposition

✍ Scribed by Toshiyuki Takizawa; Satoshi Nakazawa; Tetsuzo Ueda

Book ID: 118300147
Publisher: Springer US
Year: 2008
Tongue: English
Weight: 463 KB
Volume: 37
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-008-0386-7

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