Piezoresistive cantilevers in a commerci
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Guillermo Villanueva; Francesc PΓ©rez-Murano; Martin Zimmermann; Jan Lichtenberg;
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Article
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2006
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Elsevier Science
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English
β 212 KB
We report the development of piezoresistive cantilevers for intermolecular force detection in biochemical sensing, by using a commercial CMOS technology. The detection of the small forces involved in molecular recognition requires cantilevers with a small spring constant and high force sensitivity.