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Crystalline SiC thin film deposition by laser ablation: influence of laser surface activation

✍ Scribed by M. Diegel; F. Falk; R. Hergt; H. Hobert; H. Stafast

Publisher: Springer
Year: 1998
Tongue: English
Weight: 203 KB
Volume: 66
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s003390050653

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