Crystalline disorder reduction and defect-type change in silicon on sapphire films by silicon implantation and subsequent thermal annealing

✍ Scribed by Inoue, Tomoyasu; Yoshii, Toshio

• Book ID: 121807362
• Publisher: American Institute of Physics
• Year: 1980
• Tongue: English
• Weight: 463 KB
• Volume: 36
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.91318