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Crystalline and electrical properties of pulsed laser deposited BST on platinized silicon substrates

✍ Scribed by L Goux; M Gervais; A Catherinot; C Champeaux; F Sabary

Book ID
117145748
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
190 KB
Volume
303
Category
Article
ISSN
0022-3093

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✍ L Goux; M Gervais; F Gervais; A Catherinot; C Champeaux; F Sabary πŸ“‚ Article πŸ“… 2002 πŸ› Elsevier Science 🌐 English βš– 244 KB

The high dielectric constant (Ba,Sr)TiO 3 (BST) films have been widely used to realize capacitors integrated on silicon with a high value of capacitance. The multilayer Pt/Ti/SiO 2 /Si is one of the most currently used bottom electrodes for the integration of BST on silicon. However, the crystal ori