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Crystal–ion-slicing lithium niobate film performed by 250 keV 4He ion implantation

✍ Scribed by Y.C. Yu; C.H. Chen; H. Niu; J.Y. Hsu; T.N. Yang

Book ID: 103861701
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 343 KB
Volume: 256
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.12.058

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Crystal–ion-slicing lithium niobate film performed by 250&#xa0;keV 4He ion implantation

Crystal–ion-slicing lithium niobate film performed by 250 keV 4He ion implantation