Influence of seed/crystal interface shap
Influence of seed/crystal interface shape on dislocation generation in Czochralski Si crystal growth
โ
Toshinori Taishi; Yutaka Ohno; Ichiro Yonenaga; Keigo Hoshikawa
๐
Article
๐
2007
๐
Elsevier Science
๐
English
โ 324 KB