Crosslinking and decomposition reactions
✍
Punit Chiniwalla; Yiqun Bai; Ed Elce; Rob Shick; Sue Ann Bidstrup Allen; Paul Ko
📂
Article
📅
2003
🏛
John Wiley and Sons
🌐
English
⚖ 155 KB
👁 1 views
## Abstract Low dielectric constant materials are critical to meeting the demand for continual reduction in feature sizes and increase in interconnect density required for future high‐speed microelectronic devices. Polymers based on functionalized norbornenes are inherently attractive for these app