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Crosslinked Poly(2,2,2-Trichloroethyl Methacrylate) as a Highly Sensitive Positive Electron Resist

โœ Scribed by Tada, Tsukasa


Book ID
121664253
Publisher
The Electrochemical Society
Year
1979
Tongue
English
Weight
372 KB
Volume
126
Category
Article
ISSN
0013-4651

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An experimental study was carried out to investigate the effect of ethylene glycol dimethacrylate (EGDMA, as a crosslinking agent) content on the curing kinetics of the polymerization of 2-hydroxyethyl methacrylate (HEMA), using differential scanning calorimetry (DSC) and Fourier transform infrared