✦ LIBER ✦
Cross shaped pattern on chrome mask for 0.5 μm contact hole fabrication
✍ Scribed by Wen-An Loong; Shyi-Long Shy; Guey-Chi Guo; Ming-Tzong Yang; Shyang Su
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 371 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0167-9317
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