Cross-sectional TEM technique applied to surface damage in silicon

✍ Scribed by Stefan Johansson

• Book ID: 103684459
• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 258 KB
• Volume: 26
• Category: Article
• ISSN: 0304-3991
• DOI: 10.1016/0304-3991(88)90256-2