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Cross-sectional TEM analysis of laser-induced ripple structures on the 4H–SiC single-crystal surface

✍ Scribed by T. Okada; H. Kawahara; Y. Ishida; R. Kumai; T. Tomita; S. Matsuo; S. Hashimoto; M. Kawamoto; Y. Makita; M. Yamaguchi


Publisher
Springer
Year
2008
Tongue
English
Weight
338 KB
Volume
92
Category
Article
ISSN
1432-0630

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