Cross-sectional observation of nanoimprint resins filled in SiO2/Si mold pattern using scanning electron microscopy

✍ Scribed by Makoto Okada; Mayuko Shibata; Yuichi Haruyama; Kazuhiro Kanda; Yoshihiko Hirai; Shinji Matsui

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 822 KB
• Volume: 87
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.10.040