Critical heat flux (CHF) was measured and examined with high-speed video for subcooled flow boiling in micro-channel heat sinks using HFE 7100 as working fluid. High subcooling was achieved by pre-cooling the working fluid using a secondary low-temperature refrigeration system. The high subcooling greatly reduced both bubble departure diameter and void fraction, and precluded flow pattern transitions beyond the bubbly regime. CHF was triggered by vapor blanket formation along the micro-channel walls despite the presence of abundant core liquid, which is consistent with the mechanism of Departure from Nucleate Boiling (DNB). CHF increased with increasing mass velocity and/or subcooling and decreasing hydraulic diameter for a given total mass flow rate. A pre-mature type of CHF was caused by vapor backflow into the heat sink's inlet plenum at low mass velocities and small inlet subcoolings, and was associated with significant fluctuations in inlet and outlet pressure, as well as wall temperature. A systematic technique is developed to modify existing CHF correlations to more accurately account for features unique to micro-channel heat sinks, including rectangular cross-section, three-sided heating, and flow interaction between micro-channels. This technique is shown to be successful at correlating micro-channel heat sink data corresponding to different hydraulic diameters, mass velocities and inlet temperatures.