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Critical dimension control in photolithography based on the yield by a simulation program

✍ Scribed by H.Y. Kang; A.H.I. Lee

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 120 KB
Volume: 46
Category: Article
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2005.08.003

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