✦ LIBER ✦
Critical aspects of high energy implants for CMOS technology: Channeling effects and masking problems
✍ Scribed by P. Spinelli; A.M. Cartier; M. Bruel
- Book ID
- 113278777
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 230 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0168-583X
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