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CPW low-pass filters on silicon substrate for multilayer MMICs

✍ Scribed by Djuradj Budimir; Ian D. Robertson; A. H. Khalid; A. A. Rezazadeh


Book ID
101273106
Publisher
John Wiley and Sons
Year
1998
Tongue
English
Weight
133 KB
Volume
17
Category
Article
ISSN
0895-2477

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✦ Synopsis


A multilayer coplanar wa¨eguide low-pass filter on an Si substrate fabricated by using MMIC technology is presented, and the performance is in¨estigated experimentally and with electromagnetic simulations. The filter is a Chebyshe¨type consisting of three low-impedance sections and two high-impedance sections. The low-impedance sections ha¨e a characteristic impedance of 3 ⍀ . The high-impedance lines use a narrow center conductor mounted on top of the polyimide layers in ( ) order to achie¨e as high an impedance as possible 100 ⍀ .