Coupling of cantilever lateral bending and torsion in torsional resonance and lateral excitation modes of atomic force microscopy
โ Scribed by Song, Yaxin; Bhushan, Bharat
- Book ID
- 120272980
- Publisher
- American Institute of Physics
- Year
- 2006
- Tongue
- English
- Weight
- 962 KB
- Volume
- 99
- Category
- Article
- ISSN
- 0021-8979
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