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Coupling of a radio frequency plasma chamber with a quadrupole mass spectrometer equipped with a field ionization source

✍ Scribed by H. Hayashi; H. Iwai; F. Okuyama

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 933 KB
Volume: 88
Category: Article
ISSN: 0168-1176
DOI: 10.1016/0168-1176(89)80043-6

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