Coupling bulge testing and nanoindention to characterize materials properties of bulk micromachined structures

✍ Scribed by M. S. Kennedy; A. L. Olson; J. C. Raupp; N. R. Moody; D. F. Bahr

• Publisher: Springer-Verlag
• Year: 2005
• Tongue: English
• Weight: 224 KB
• Volume: 11
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-004-0439-7