✦ LIBER ✦
Coupled mesoscale—continuum simulations of copper electrodeposition in a trench
✍ Scribed by Timothy O. Drews; Eric G. Webb; David L. Ma; Jay Alameda; Richard D. Braatz; Richard C. Alkire
- Publisher
- American Institute of Chemical Engineers
- Year
- 2004
- Tongue
- English
- Weight
- 346 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0001-1541
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