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Coupled effect of nitrogen addition and surface temperature on the morphology and the kinetics of thick CVD diamond single crystals

✍ Scribed by Achard, J.; Silva, F.; Brinza, O.; Tallaire, A.; Gicquel, A.

Book ID
120272071
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
829 KB
Volume
16
Category
Article
ISSN
0925-9635

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## Abstract Diamond films were synthesized with up to 50% argon in the gas phase using high power plasma‐assisted chemical vapour deposition (PACVD). This resulted in a strong increase of the deposition rates. Polycrystalline diamond (PCD) films grown with Ar have shown a higher incorporation of sp