Corrosive series turbomolecular pumps for semiconductor processes: DG Götz,Leybold-Heraeus GmbH, 5000 Köln 51, West Germany

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 128 KB
• Volume: 34
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(84)90197-0