✦ LIBER ✦
Correlation of Stress in Silicon Nitride Layers with their Complete Removal by Laser Ablation
✍ Scribed by Engelhardt, Josh; Ohl, Sibylle; Hahn, Giso; Terheiden, Barbara
- Book ID
- 122890619
- Publisher
- Elsevier
- Year
- 2013
- Weight
- 612 KB
- Volume
- 38
- Category
- Article
- ISSN
- 1876-6102
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