✦ LIBER ✦
Correlation of in situ ellipsometric and light scattering data of silicon-based materials with post-deposition diagnostics
✍ Scribed by C. Pickering
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 822 KB
- Volume
- 206
- Category
- Article
- ISSN
- 0040-6090
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