✦ LIBER ✦
Correlation Length Measurement of Sidewall Roughness of Dry Etched Facet and Its Effect on Reflectivity
✍ Scribed by Satoshi Mitsugi; Fumio Koyama; Akihiro Matsutani
- Publisher
- Optical Society of Japan
- Year
- 1999
- Tongue
- English
- Weight
- 236 KB
- Volume
- 6
- Category
- Article
- ISSN
- 1340-6000
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