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Correlation in the change of internal stresses and electrical properties in metal-insulator-metal film structures during heat treatment

✍ Scribed by A. I. Korobov; A. S. Naumchenko; S. S. Shchegolov


Book ID
112417759
Publisher
Springer
Year
1971
Tongue
English
Weight
265 KB
Volume
14
Category
Article
ISSN
1573-9228

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